SEM topography analysis equipment
Resolution: 1.3nm (20 KV); acceleration voltage: 0.02-30KV; probe current: 4 pA-20 nA; amplification factor: 10-1000 000X
Field emission scanning electron microscope, SIGMA HD is equipped with GEMINI lens tube with in-lens secondary electron detector, sample chamber secondary electron detector, backscatter electron detector and CCD camera, etc. The sample stage is Five-axis fully automatic control, can provide excellent resolution and brightness, suitable for clear imaging of sample shape. With high vacuum and variable pressure mode, it realizes high-resolution imaging of analytical field emission scanning electron microscope, and can image samples at low acceleration voltage (750V-3kV) and low probe current.